MEMS 2012 Dr. Lynn Fuller, Ivan Puchades
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© January 22, 2011 Dr. Lynn Fuller, Professor MEMS 2012 Page 1 Rochester Institute of Technology Microelectronic Engineering ROCHESTER INSTITUTE OF TECHNOLOGY MICROELECTRONIC ENGINEERING MEMS 2012 Dr. Lynn Fuller, Ivan Puchades Microelectronic Engineering Rochester Institute of Technology 82 Lomb Memorial Drive Rochester, NY 14623-5604 Email: [email protected] Dr. Fuller’s Webpage: http://www.people.rit.edu/lffeee MicroE Webpage: http://www.microe.rit.edu 12-5-2011 MEMS2011.ppt
Transcript of MEMS 2012 Dr. Lynn Fuller, Ivan Puchades
© January 22, 2011 Dr. Lynn Fuller, Professor
MEMS 2012
Page 1
Rochester Institute of Technology
Microelectronic Engineering
ROCHESTER INSTITUTE OF TECHNOLOGYMICROELECTRONIC ENGINEERING
MEMS 2012
Dr. Lynn Fuller, Ivan Puchades
Microelectronic EngineeringRochester Institute of Technology
82 Lomb Memorial DriveRochester, NY 14623-5604
Email: [email protected]. Fuller’s Webpage: http://www.people.rit.edu/lffeee
MicroE Webpage: http://www.microe.rit.edu
12-5-2011 MEMS2011.ppt
© January 22, 2011 Dr. Lynn Fuller, Professor
MEMS 2012
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Rochester Institute of Technology
Microelectronic Engineering
OUTLINE
ProjectsMEMS Chip Designs
ResistorsDiodesPressure SensorGas Flow SensorMultisensor1-Axis Accelerometer3-Axis AccelerometerTemperature & Chemical ProbeThermopilePeltier Heat Pump
© January 22, 2011 Dr. Lynn Fuller, Professor
MEMS 2012
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Rochester Institute of Technology
Microelectronic Engineering
PROJECTS
Chip Designs for MEMS Fabrication ClassNew MEMS Devices
Micro Bolometer / Sensor or ImagerMEMS SwitchesMEMS Resonator / Filter / SwitchMEMS Surface Micromachine Process
Energy HarvestingEnergy Source
ElectromagneticPhotovoltaicPiezoelectric
Testing of John Galt CMOS ChipsPCB Packages for MEMS and CMOSProcess Development
Lam 4600 as Silicon EtcherWireless Sensor NetworkResearch Projects Dr.WatSen, PRISM, Oil QualityISFETs
© January 22, 2011 Dr. Lynn Fuller, Professor
MEMS 2012
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Rochester Institute of Technology
Microelectronic Engineering
RESISTORS
© January 22, 2011 Dr. Lynn Fuller, Professor
MEMS 2012
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Rochester Institute of Technology
Microelectronic Engineering
DIODES
© January 22, 2011 Dr. Lynn Fuller, Professor
MEMS 2012
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Rochester Institute of Technology
Microelectronic Engineering
PRESSURE SENSOR
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MEMS 2012
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Rochester Institute of Technology
Microelectronic Engineering
GAS FLOW SENSOR
© January 22, 2011 Dr. Lynn Fuller, Professor
MEMS 2012
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Rochester Institute of Technology
Microelectronic Engineering
MULTISENSOR
© January 22, 2011 Dr. Lynn Fuller, Professor
MEMS 2012
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Rochester Institute of Technology
Microelectronic Engineering
1 AXIS ACCELEROMETER
© January 22, 2011 Dr. Lynn Fuller, Professor
MEMS 2012
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Rochester Institute of Technology
Microelectronic Engineering
3-AXES ACCELEROMETER
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MEMS 2012
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Rochester Institute of Technology
Microelectronic Engineering
TEMPERATURE AND CHEMICAL SENSOR PROBE
© January 22, 2011 Dr. Lynn Fuller, Professor
MEMS 2012
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Rochester Institute of Technology
Microelectronic Engineering
THERMOPILE (SEEBECK EFFECT)
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MEMS 2012
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Rochester Institute of Technology
Microelectronic Engineering
PELTIER EFFECT HEAT PUMP
