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Transcript of Sciences et Techniques Industrielles de la Lumière STIL - Le Mercure Batiment C - 80, rue Charles...
Sciences et TechniquesIndustrielles de la Lumière
STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - FranceTéléphone : 33 (0)4.42.39.45.85 - Télécopie : 33 (0)4.42.24.38.05
STIL - Email : [email protected]
QUASI CONFOCAL EXTENDED FIELD SURFACE SENSING
Joseph COHEN-SABBAN, Pierre-Jean CREPIN, Jérôme GAILLARD-GROLEAS
STIL SA
Optical Metrology for the Semicon, Optical and Data Storage Industries
SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, 2001
Sciences et TechniquesIndustrielles de la Lumière
STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - FranceTéléphone : 33 (0)4.42.39.45.85 - Télécopie : 33 (0)4.42.24.38.05
STIL
CONFOCAL IMAGING
The « SINGLE POINT » viewing system
Confocal imaging consists in :
1) Imaging a point source S into a sharply focused point S’
2) Reversely, imaging this sharply focused point S’ onto a tiny spatial filter S’’
Such an optical setup is absolutely blind for all the space except for the sharply focused point S’.
S
S’
S’’
L
point source
spatial filter
- Email : [email protected]
Optical Metrology for the Semicon, Optical and Data Storage Industries
SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, 2001
Sciences et TechniquesIndustrielles de la Lumière
STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - FranceTéléphone : 33 (0)4.42.39.45.85 - Télécopie : 33 (0)4.42.24.38.05
STIL
defocused specular object defocused backscattering object
The Property of « Optical Sectioning »
L
S
A’S’’
A
L
S
B’S’’
B
sharp focusposition S’
CONFOCAL IMAGING
- Email : [email protected]
Optical Metrology for the Semicon, Optical and Data Storage Industries
SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, 2001
Sciences et TechniquesIndustrielles de la Lumière
STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - FranceTéléphone : 33 (0)4.42.39.45.85 - Télécopie : 33 (0)4.42.24.38.05
STIL
« Z-axis » FIELD EXTENSION IN CONFOCAL IMAGING
The field extension can be obtained by stretching the chromatic aberration of the focusing lens L.
The new optical system is then the assembling of an infinity of purely confocal systems, one for each wavelength.
Such a compound system is absolutely blind for all the space except for the sharply focused color coded segment [S’(S’(n]
Continuum of monochromaticimages S’ (i)
PolychromaticPoint Source
Spatial filter
L
S
S’’
1
n
i
The SINGLE LINE viewing system
- Email : [email protected]
Optical Metrology for the Semicon, Optical and Data Storage Industries
SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, 2001
Sciences et TechniquesIndustrielles de la Lumière
STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - FranceTéléphone : 33 (0)4.42.39.45.85 - Télécopie : 33 (0)4.42.24.38.05
STIL
EXTENDED FIELD CONFOCAL IMAGING
The property of PERFECT FOCUS
Optical Metrology for the Semicon, Optical and Data Storage Industries
SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, 2001
- Email : [email protected]
The SINGLE LINE viewing system presents the unique property of « PERFECT FOCUS » over all the chromatic EXTENDED FIELD since at any given point of the axial field of view there is only one wavelength perfectly focused on the object, all the other wavelengths being absolutely inactive.
L
Extended field
Sciences et TechniquesIndustrielles de la Lumière
STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - FranceTéléphone : 33 (0)4.42.39.45.85 - Télécopie : 33 (0)4.42.24.38.05
STIL - Email : [email protected]
EXTENDED FIELD CONFOCAL SCANNING OPTICAL MICROSCOPY
AVOIDS THE Z-AXIS STEPPING PROCESS USED TO GENERATECONFOCAL SLICES THAT ARE COLLECTED TO CREATE
A PERFECTLY FOCUSED IMAGE
Optical Metrology for the Semicon, Optical and Data Storage Industries
SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, 2001
EF - CSOM
AVOIDS THE TIME CONSUMING COMPUTER RECONSTRUCTION OF THE OBJECT IMAGE
CAN PROVIDE HIGHLY ACCURATE3D SURFACE METROLOGY
WHEN AN ADEQUATE SPECTRAL DECODING IS IMPLEMENTED
Sciences et TechniquesIndustrielles de la Lumière
STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - FranceTéléphone : 33 (0)4.42.39.45.85 - Télécopie : 33 (0)4.42.24.38.05
STIL
EXTENDED FIELD CONFOCAL IMAGING
3D SURFACE METROLOGY (1)
- Email : [email protected]
Optical Metrology for the Semicon, Optical and Data Storage Industries
SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, 2001
3D SURFACE METROLOGY CAN BE ACHIEVED WHEN SUCCESSIVELY PERFORMINGTHE FOLLOWING STEPS.
SPACE CODING
By stretching the axial chromatic aberration of the illuminating beam
SPACE DECODING
By analysing the spectral content of the backscattered / backreflected beam
Sciences et TechniquesIndustrielles de la Lumière
STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - FranceTéléphone : 33 (0)4.42.39.45.85 - Télécopie : 33 (0)4.42.24.38.05
STIL
EXTENDED FIELD CONFOCAL IMAGING
3D SURFACE METROLOGY (2)
The confocal spatial filter limits the wavelengths bandwidth to a narrow band centered on the wavelength i coming in perfect focus onto the object surface.
- Email : [email protected]
Optical Metrology for the Semicon, Optical and Data Storage Industries
SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, 2001
Continuum ofmonochromaticimages S’ (i)
PolychromaticPoint Source
Spatial Filter
monochromatic image
Object Surface
Spectrometer
S’’(i)
S’
L
1
n
I
I
i
S
The spectral decoding is performed by the spectrometer (position of the return quasi monochromatic beam on the CCD linear array).
Sciences et TechniquesIndustrielles de la Lumière
STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - FranceTéléphone : 33 (0)4.42.39.45.85 - Télécopie : 33 (0)4.42.24.38.05
STIL
EXTENDED FIELD CONFOCAL IMAGING
3D SURFACE METROLOGY (3)
- Email : [email protected]
Optical Metrology for the Semicon, Optical and Data Storage Industries
SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, 2001
I
i
The system is volontarily renderedQuasi-Confocal by enlarging the Point Source and the Spatial Filter pinholes.
Consequently, the filtered bandwidth is enlarged in order to enable a highly resolved post processing and to get 30000 resolved points along the color coded segment [S’(1), S’(n)].
Sciences et TechniquesIndustrielles de la Lumière
STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - FranceTéléphone : 33 (0)4.42.39.45.85 - Télécopie : 33 (0)4.42.24.38.05
STIL
EXTENDED FIELD CONFOCAL IMAGING
CHR 150 BLOCK DIAGRAM
Optical Metrology for the Semicon, Optical and Data Storage Industries
SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, 2001
Fiberoptic linkOptical pen
Polychromaticlight source Spectrometer
Digital Signal Processing
Analogic and digitaloutputs
OPTOELECTRONIC CABINET
Fiberoptic coupler
n
- Email : [email protected]
Sciences et TechniquesIndustrielles de la Lumière
STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - FranceTéléphone : 33 (0)4.42.39.45.85 - Télécopie : 33 (0)4.42.24.38.05
STILOptical Metrology for the Semicon, Optical and Data Storage Industries
SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, 2001
- Email : [email protected]
EXTENDED FIELD CONFOCAL IMAGING
CHR 150 OPTICAL PENS
Depth of field 20 µm 80 µm 300 µm 350 µm 3 mm 6 mm 10 mm
Working distance 0,6 mm 2,1 mm 4,5 mm 12 mm 38 mm 53 mm 65 mm
Z axis resolution 1 nm 3 nm 10 nm 10 nm 100 nm 200 nm 300 nm
Accuracy 10 nm 30 nm 0,1 µm 0,1 µm 1 µm 2 µm 1 µm
Spot diameter 1 µm 2 µm 4 µm 1,5 µm*
10 µm 40 µm 50 µm
Lateral resolution 0,5 µm 1 µm 2 µm 0,75µm
5 µm 20 µm 25 µm
Numerical aperture 0,69 0,57 0,5 0,5 0,26 0,26 0,17
Max angular slope(+/-)**
44° 35° 30° 30° 15° 15° 10°
* With an optical fiber of 10 microns core diameter** On specular surfaces. For scattering surfaces the maximum angular slope can reach 80 degrees
Sciences et TechniquesIndustrielles de la Lumière
STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - FranceTéléphone : 33 (0)4.42.39.45.85 - Télécopie : 33 (0)4.42.24.38.05
STIL
EXTENDED FIELD CONFOCAL IMAGING
CHR 150 SIGNAL OUTPUTS (1)
Optical Metrology for the Semicon, Optical and Data Storage Industries
SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, 2001
- Email : [email protected]
MEASURING MODE :
* Single Surface mode :
- Intensity, Height : Both data are acquired simultaneously
* Double Surface mode :
- Intensity and height of the first surface- Intensity and height of the second surface- Thickness : calculated in real time
acquired simultaneously
Sciences et TechniquesIndustrielles de la Lumière
STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - FranceTéléphone : 33 (0)4.42.39.45.85 - Télécopie : 33 (0)4.42.24.38.05
STIL
EXTENDED FIELD CONFOCAL IMAGING
CHR 150 SIGNAL OUTPUTS (2)
Optical Metrology for the Semicon, Optical and Data Storage Industries
SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, 2001
- Email : [email protected]
Analog Signals :
- 2 configurable outputs 0 - 10 V
Digital Signals:
- RS 232 serial link at 115200 bauds. - Birectionnal link used to :
. transmit the measuring data to a PC . configure and drive the sensor from a PC
Synchronization input and output :
- 5V TTL signals.
Sciences et TechniquesIndustrielles de la Lumière
STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - FranceTéléphone : 33 (0)4.42.39.45.85 - Télécopie : 33 (0)4.42.24.38.05
STILOptical Metrology for the Semicon, Optical and Data Storage Industries
SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, 2001
EXTENDED FIELD CONFOCAL IMAGING
CHR 150 Optical Sensor
Optoelectronic Cabinet
Optical pens
Sciences et TechniquesIndustrielles de la Lumière
STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - FranceTéléphone : 33 (0)4.42.39.45.85 - Télécopie : 33 (0)4.42.24.38.05
STIL
Diamond machined Diffractive Germanium lens
CHR 150 Optical Sensor 80 µm depth of field optical pen
3D surface mappingHeight measurement
Photorealistic renderingIntensity measurement
Optical Metrology for the Semicon, Optical and Data Storage Industries
SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, 2001
Sciences et TechniquesIndustrielles de la Lumière
STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - FranceTéléphone : 33 (0)4.42.39.45.85 - Télécopie : 33 (0)4.42.24.38.05
STIL
Diamond machined Diffractive Germanium lens
CHR 150 Optical Sensor 20 µm depth of field optical pen
3D surface mapping - Height measurement
Profile extracted along the black line
Optical Metrology for the Semicon, Optical and Data Storage Industries
SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, 2001
Sciences et TechniquesIndustrielles de la Lumière
STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - FranceTéléphone : 33 (0)4.42.39.45.85 - Télécopie : 33 (0)4.42.24.38.05
STIL
Holographic Transmission diffraction grating (ZnSe)
CHR 150 Optical Sensor 80 µm depth of field optical pen
3D surface mappingHeight measurement
Photorealistic renderingIntensity measurement
Optical Metrology for the Semicon, Optical and Data Storage Industries
SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, 2001
Sciences et TechniquesIndustrielles de la Lumière
STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - FranceTéléphone : 33 (0)4.42.39.45.85 - Télécopie : 33 (0)4.42.24.38.05
STIL
Groove top of a Holographic Transmission diffraction grating (ZnSe)
CHR 150 Optical Sensor 20 µm depth of field optical pen
Roughness component filteredwith a 0.04 mm cut-off
Waviness component filteredwith a 0.04 mm cut-off
Optical Metrology for the Semicon, Optical and Data Storage Industries
SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, 2001
Groove top area
Sciences et TechniquesIndustrielles de la Lumière
STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - FranceTéléphone : 33 (0)4.42.39.45.85 - Télécopie : 33 (0)4.42.24.38.05
STILOptical Metrology for the Semicon, Optical and Data Storage Industries
SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, 2001
CCD matrix area
CHR 150 Optical Sensor 80 µm depth of field optical pen
3D surface metrologyof a CCD matrix area
Surface wavinessof the same CCD matrix area
Sciences et TechniquesIndustrielles de la Lumière
STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - FranceTéléphone : 33 (0)4.42.39.45.85 - Télécopie : 33 (0)4.42.24.38.05
STILOptical Metrology for the Semicon, Optical and Data Storage Industries
SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, 2001
CCD matrix area
CHR 150 Optical Sensor 80 µm depth of field optical pen
3D surface metrologyof a CCD matrix area
Surface wavinessof the same CCD matrix area
Sciences et TechniquesIndustrielles de la Lumière
STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - FranceTéléphone : 33 (0)4.42.39.45.85 - Télécopie : 33 (0)4.42.24.38.05
STILSciences et Techniques
Industrielles de la Lumière
STIL
CHR 150 Optical Sensor80 µm depth of field optical pen
3D surface mappingHeight measurement
Photorealistic renderingIntensity measurement
Photogravure processed in LIGA technology
Optical Metrology for the Semicon, Optical and Data Storage Industries
SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, 2001
Sciences et TechniquesIndustrielles de la Lumière
STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - FranceTéléphone : 33 (0)4.42.39.45.85 - Télécopie : 33 (0)4.42.24.38.05
STIL
Optical Waveguide
CHR 150 Optical Sensor 80 µm depth of field optical pen
Optical Metrology for the Semicon, Optical and Data Storage Industries
SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, 2001
3D surface mappingHeight measurement
Photorealistic renderingIntensity measurement
Sciences et TechniquesIndustrielles de la Lumière
STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - FranceTéléphone : 33 (0)4.42.39.45.85 - Télécopie : 33 (0)4.42.24.38.05
STIL
Ball Grid Array (BGA)
CHR 150 Optical Sensor 350 µm depth of field optical pen
Optical Metrology for the Semicon, Optical and Data Storage Industries
SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, 2001
3D surface mappingHeight measurement
Profile extracted along the white line
Zoom on one bumps line
Sciences et TechniquesIndustrielles de la Lumière
STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - FranceTéléphone : 33 (0)4.42.39.45.85 - Télécopie : 33 (0)4.42.24.38.05
STIL
Field Emission Display flat screen
CHR 150 Optical Sensor 20 µm depth of field optical pen
3D surface mappingHeight measurement
Photorealistic renderingIntensity measurement
Optical Metrology for the Semicon, Optical and Data Storage Industries
SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, 2001
Sciences et TechniquesIndustrielles de la Lumière
STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - FranceTéléphone : 33 (0)4.42.39.45.85 - Télécopie : 33 (0)4.42.24.38.05
STILOptical Metrology for the Semicon, Optical and Data Storage Industries
SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, 2001
Micro Opto Electro Mechanical System (MOEMS)
CHR 150 Optical Sensor 20 µm depth of field optical pen
3D surface mappingHeight measurement
Photorealistic renderingIntensity measurement
Sciences et TechniquesIndustrielles de la Lumière
STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - FranceTéléphone : 33 (0)4.42.39.45.85 - Télécopie : 33 (0)4.42.24.38.05
STILOptical Metrology for the Semicon, Optical and Data Storage Industries
SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, 2001
CHR 150 Optical Sensor 20 µm depth of field optical pen
Microlens array
3D surface mapping - Height measurement
Sciences et TechniquesIndustrielles de la Lumière
STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - FranceTéléphone : 33 (0)4.42.39.45.85 - Télécopie : 33 (0)4.42.24.38.05
STILOptical Metrology for the Semicon, Optical and Data Storage Industries
SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, 2001
Molded microlens
CHR 150 Optical Sensor 300 µm depth of field optical pen
3D surface mappingHeight measurement
Photographic representation
Sciences et TechniquesIndustrielles de la Lumière
STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - FranceTéléphone : 33 (0)4.42.39.45.85 - Télécopie : 33 (0)4.42.24.38.05
STILOptical Metrology for the Semicon, Optical and Data Storage Industries
SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, 2001
Scratch on a Germanium lens
CHR 150 Optical Sensor 300 µm depth of field optical pen
3D surface mappingHeight measurement
Extracted profile n°1 Extracted profile n°2
Extracted profile n°3
3
1
2
Sciences et TechniquesIndustrielles de la Lumière
STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - FranceTéléphone : 33 (0)4.42.39.45.85 - Télécopie : 33 (0)4.42.24.38.05
STIL
CHR 150 Optical Sensor 80 µm depth of field optical pen
3D surface mappingHeight measurement
Gold deposition on Alumina substrate
Photorealistic renderingIntensity measurement
Optical Metrology for the Semicon, Optical and Data Storage Industries
SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, 2001
Sciences et TechniquesIndustrielles de la Lumière
STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - FranceTéléphone : 33 (0)4.42.39.45.85 - Télécopie : 33 (0)4.42.24.38.05
STILOptical Metrology for the Semicon, Optical and Data Storage Industries
SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, 2001
CHR 150 Optical Sensor 80 µm depth of field optical pen
Laser marking on a component packaging
3D surface mappingHeight measurement
Photorealistic renderingIntensity measurement
Profile extracted from the black line
Sciences et TechniquesIndustrielles de la Lumière
STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - FranceTéléphone : 33 (0)4.42.39.45.85 - Télécopie : 33 (0)4.42.24.38.05
STILOptical Metrology for the Semicon, Optical and Data Storage Industries
SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, 2001
Paper
CHR 150 Optical Sensor 20 µm depth of field optical pen
3D surface mappingHeight measurement
Photorealistic renderingIntensity measurement
Sciences et TechniquesIndustrielles de la Lumière
STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - FranceTéléphone : 33 (0)4.42.39.45.85 - Télécopie : 33 (0)4.42.24.38.05
STIL
Microwave Generator
CHR 150 Optical Sensor 350 µm depth of field optical pen
3D surface mappingHeight measurement
Photorealistic renderingIntensity measurement
Optical Metrology for the Semicon, Optical and Data Storage Industries
SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, 2001
Alumina
Gold
Sciences et TechniquesIndustrielles de la Lumière
STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - FranceTéléphone : 33 (0)4.42.39.45.85 - Télécopie : 33 (0)4.42.24.38.05
STIL
Roughness of S1
Roughness of S2
Thickness mapping : e = e ( x , y )
Optical Metrology for the Semicon, Optical and Data Storage Industries
SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, 2001
- Email : [email protected]
THICKNESS MAPPING
DUAL SURFACE ROUGHNESS MAPPING
Advantages
* single side information pick-up* purely optical measurement* very fast* very accurate
Dedicated software
Polychromatic point source
White light
Spectrometer
S1
S2
Sciences et TechniquesIndustrielles de la Lumière
STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - FranceTéléphone : 33 (0)4.42.39.45.85 - Télécopie : 33 (0)4.42.24.38.05
STIL
Advantages
* thickness measurement mode* single side information pick-up* purely optical measurement* very fast* very accurate
Polychromatic point source
Dedicated software
White light
Spectrometer
Object surface : S2Thickness mappinge = e ( x , y )
S2 = S ( x , y )
Reference Surface : S1
- Email : [email protected]
ABSOLUTE 3D SURFACE MAPPING
Optical Metrology for the Semicon, Optical and Data Storage Industries
SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, 2001
Sciences et TechniquesIndustrielles de la Lumière
STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - FranceTéléphone : 33 (0)4.42.39.45.85 - Télécopie : 33 (0)4.42.24.38.05
STIL
OPTICS MANUFACTURING QUALITY CONTROL
Advantages
* no need to reverse the lens* purely optical measurement* very fast* very accurate
Single Shot, FRONT and BACK SURFACES PICK-UP
Dedicated software
Polychromatic point source
White light
Spectrometer
Radiuses : R1 R2
Tilt, Centeringdiameter Central thickness
R1
R2diameter
Optical Metrology for the Semicon, Optical and Data Storage Industries
SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, 2001
- Email : [email protected]
Sciences et TechniquesIndustrielles de la Lumière
STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - FranceTéléphone : 33 (0)4.42.39.45.85 - Télécopie : 33 (0)4.42.24.38.05
STIL
Advantages
* purely optical measurement* no moving parts* very fast* very accurate
z2 (2) - z1 (1) = R
Spherical objectRadius R
Spectrometer
Polychromatic point source
White light
C
Optical Metrology for the Semicon, Optical and Data Storage Industries
SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, 2001
- Email : [email protected]
SINGLE SHOT SPHEROMETRY
Sciences et TechniquesIndustrielles de la Lumière
STIL - Le Mercure Batiment C - 80, rue Charles Duchesne - 13851 Aix en Provence Cedex 3 - FranceTéléphone : 33 (0)4.42.39.45.85 - Télécopie : 33 (0)4.42.24.38.05
STILOptical Metrology for the Semicon, Optical and Data Storage Industries
SPIE’s 46th Annual Meeting - San Diego, CA 2-3 August, 2001
- Email : [email protected]
CONCLUSION
Implementation of controlled axial chromatic aberration to
CONFOCAL SCANNING OPTICAL MICROSCOPY
opens new ways to the application fields of :
The proposed optical setup is capable of giving both information simultaneously.
* Perfect Focus Free Shape Surface Microscopy
* Free Shape 3D Surface Metrology