INSTRUMENTATION k41wna£Ö - Quatek · 8Ö©? Jª5[Ñ+Õ W¬ Ip/ rLÕOjhg^ Qy¹z Bentham TMC300...

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  • INSTRUMENTATION

    www.quatek.com.tw

  • Nanometrics HL5500PC■

    Nanotronics nSpec■■■■■

    C-V ProfilerNanometrics ECVPro■■■

    ■■

    ■■

    ■■■■■■

    (FTIR)Nanometrics QS-1200■■■■■■■■

    Nanometrics RPMBlue

    ■■■

    Nanometrics Imperia

    -

    ■■■■■■

    Nanometrics Nanospec II

    ■■

    ■■■

    ■■■■■

    Tohospec 3100/Tohospec 3100T

    ■■■■■■

    PhysTech DLTS

    ■ ■■■■

    Corema

    ■■■■■

    PhysTech RH2035

    ■■■■■

    /Tera Evaluator

    Quatek RST-100

    1

    PL 6” ~7 250μm/ Particle

    Chip on wafer mapping

    1Å75~300mm

    120nm2D 3D Mapping

    UV 35ÅRobot

    2Å75~300mm

    Nanometrics2D 3D Mapping

    BPSGSiNFSG

    2D/3D Mapping

    D2W

    SiC GaAs GaN

    105~1012Ω·cm1mm( )

    mapping

    Fourier LaplaceI/V C/V

    C(T)

    IV IIIV

    &77K

    “ ”

    Wafer 2”~8”Wafer / PL

    VCSEL DBR200~2600nm≤0.5nm

    0.1nm

    Particle

    III-V GaAs GaN II-VI SiCell Fill/De-bubble/Cell Empty/Sample

    CleanWhole Wafer Mapping

    RoHs

    wafer

    50~300mmAFM

    1015Ω·cm

    1GΩ 500GΩ 1TΩ 5TΩ 50TΩ

    Si III-V II-VICIGS

    Sample Van Der PauwBar Bridge

    0.32T0.1% 25mm ±1%

    0.1 0.2 0.40.5T 100GΩ/

    90~500K -600°C

    10~350K

  • ■■■■

    Napson RT-70V/RG-5/RG-7/RG-7S/RG-10

    ■■■

    TFT-LCD/CFNapson RT-3000/RS-1300

    ■■■■■

    Napson Jandel 4-point Probe Head

    ■■■■

    300mm Wafer MappingNapson WS-3000

    ■■

    Napson NC-6800 + TTV

    ■■

    ■■■

    Napson FLA300/FLA200

    Napson EC-80/EC-80P

    ■■■

    PNNapson PN-12α/PN-50α/PN-1S/PN-8LP

    PN-12α

    PN-1S

    PN-50α

    PN-8LP

    ■■■■■■

    Napson Cresbox/RT-3000/RG-80N

    EC-80P

    EC-80EC-80

    ■■■■

    MappingNapson NC-80MAP

    ■■

    /Napson DUORES

    www.quatek.com.tw

    2

    ■■

    ■■■■■

    EC-80P

    Low:Middle:

    0.01~0.5Ω/0.5~10Ω/

    High:S/High:

    10~1,000Ω/1,000~3,000Ω/

    ■■■■■

    Napson PVE-80

    ITO (RT-70V/RG-5/RG-7S)

    Sheet(RT-70V/RG-5/RG-7)

    ±0.1%(0.01Ω~1MΩ)±0.2%(NIST )

    Ingot RG-10 Ingot

    Silicon Wafers Diffused WafersIon-implanted Wafers Epitaxial Layers MetalFilms

    2D/3D/ /

    ( )

    2”~8”Φ 156mm

    (Sheet Resistance Resistivity)Silicon Wafer Wafer P/N

    200mm SMIF 300mm FOUP( )2D/3D Mapping

    49 1

    TFT-LCD/CF Substrates(ITOMetal Layers n+a-Si Layers)

    2880x3080mm

    50μ 1m ohm/sq

    3 ( [Ohm/Sq][S/cm] [S])

    : 5386394

    Teflon1mm(0.50 0.635 1.59mm )

    12.5~500μm10~200g/

    (ITO, TCO ) LOW-E(Carbon Nanotubes)

    (Graphenmaterials)0.5~200Ω/sq( )

    0.1~4000 Ω/sq ( )

    2“~8“/300~80μmSilicon Wafers, GaAs Epi, GaN,

    GaP, ITO, Metal Layers

    Silicon Wafers, GaAs Epi, GaN, GaP, ITO, Metal Layers, AgNW, Nx2O5, CNT

    2”~8”/300~800μmP/N

    2”~8”( )

    Silicon Wafers, GaAs EPi, GaN, GaP, InP, ITO, Metal Layers

    2172D 3D6mmNC-600MAP NC-800MAP

    PN(TTV STIR Bow Warp )

    Insepction (Microcrack)(Life-time)

    PN

    PN-12α:1mΩ·cm~20kΩ·cm(Bulk) in ResistivityPN-50α: 0.1Ω·cm~1kΩ·cm(Bulk) in ResistivityPN-1S: 0.01Ω·cm~1kΩ·cm(Bulk)PN-8LP: 0.02Ω·cm~5kΩ·cm(Bulk)LED (P=Red N=Green NG= Yellow)

    Si/GaAs/Ge/InP , TTV/BOW/Warp/site and global Flatness

    ( ASTM )Max.1200 /2-D/3-D MappingWafer size: 3 ~8 inch (Max. 12 inch)

  • ■■■

    /Bentham TMC300■

    ■■■■

    GaAs /

    SW Link RPV

    ■■■■

    ■■■■■■■

    Napson RG-200PV

    ■■

    ■■

    Napson SRS-2010

    contacts

    p type SiHighly doped n type

    Depletion layer

    ■■■■■■

    Napson DF-9P

    ■■■■

    Napson DF-100

    ■■■

    eDAQ Inphaze (EIS)

    ■■■■■

    ■■■■■

    OAI PV&I-V System

    ■■■

    Napson NC-600/NC-700/NC-100PV

    ■■■■■

    Napson HF-90R/HF-100DC

    PG2000

    I-V

    NC-100PV

    NC-600/NC-700

    3

    ■■■

    Napson JPV-100

    (Life-Time)Napson HF-300

    ■■■

    Napson CRN-100

    1000/ 300mmx300mm

    2D/3D ( )1mΩ/ ~1000kΩ/ ( 1mΩ/ ~10MΩ/ )1mΩ·cm~200Ω·cm

    15 5

    40.001~1000Ω/sq

    9Mapping

    OK/NG

    0.01~1000ohm/sq 9 10

    9

    109~1015Ω/IGZO

    (μ-PCD)

    0.1μS~1000μS(0.1~1000Ω·cm )

    (75W) (100W)

    200~ 2500nm - -

    AAA

    SLP208mm

    - PN - CV I-V -

    0.001

    10~200ohm/sq

    ITO10~1000Ω/

    Life-time PN

    OK/NG

    RS IPIV

    >10,000RS100 6

    1x1mm2 15x15mm2CPV

    (HF90R)(HF-100DC)

    /

    100μS~5000μS(HF90R) 50μS~20mS(HF-100DC) (10~5000Ω·cm )

    JIS

    n-type silicon 213~519 cm-3 p-type silicon 214~719 cm-3

    1~109ΩASTM

    IPCE( / QE)

  • ■■■■■

    ■■

    ( )0.1nm~250μm

    SiNx SiOxNx PSG BPSG ITO a-SiPolysilicon a-c:h DLC Lood PR Polyimide SOG

    SCI FilmTek™ SYSTEM12”

    0~500μm0~500μm

    10nm~350μm40wph(9 )

    TSVSCI FilmTek™ 2000M TSV

    MicroSense /Bow/Warp/Flatness/TTV

    ■■■

    ■■

    ■■■

    ■■■

    APBP

    Saw frame

    2D 3DTSV

    3~12III-V GaAs Ge InP GaN…

    Sapphire QuartzGlass SiC SOI …

    Stacks of Wafers Wafer on fameTaped Wafer Mounted Wafer

    / TTV Bow WarpBending

    *

    (2μm )

    TE/TM

    ( )

    FilmTek™ 1000

    ±0.005

    10nm~200μm

    380~1000

    380~1000

    √(1500)

    FilmTek™ 4000

    ±0.00002

    3nm-200μm

    190-1700

    380-1000

    √(4500)

    FilmTek™ 1500

    ±0.005

    10nm~200μm

    380~1000

    380~1000

    √(1500)

    FilmTek™ 2000

    ±0.002

    5nm~200μm

    190~1700

    240~1000

    √(3000)

    FilmTek™ 3000

    ±0.002

    5nm~200μm

    190~1700

    240~1000

    √(3000)

    FilmTek™ 2000SE

    ±0.0002

    1Å-200μm

    190-1700

    240-1000

    √(3000)

    www.quatek.com.tw

    4/

    ■■■■

    MicroSense UMA-C200L

    ■■■■

    MicroSense UMA-C200-STR

    8” Thickness/TTV/Bow/Warp/SBIR/SFQR

    AXX 32% Throughput200,000

    AXX(Match correlation)

    5400/5500 68 inch 2mm

    Open Casstte,SMIF120,000

  • 5

    SiC/GaN/Si IGBT/MOFFET/Diode

  • www.quatek.com.tw

    6/ /

    Pegasus PG2000LED

    2” 4”LEDLED

    1024x768 CCDmw

    LED 25k/h

    ■■■■■■■

    MEMS6”~8”MEMS

    Agilent LCR meter

    chuckDouble Side

    Special Desigh GaAs

    ■■■■■■

    Pegasus PG 101W

    4”~8”/

    LEDLD/PD

    /MEMS/ /

    ■■■■■■■■■

    LEDAPS

    BC

    P7LED

    APSL H3C

    ■■

    P7

    BC

    Wentworth S200FA/300FA8”~12“ FA IC Debug

    -65°C~300°CRF fA

    500x~2000x

    CableConnector

    CCDLabmaster

    ■■■■■■

    ■■

    ( / )Wentworth M200FA/S200FA-HV

    IGBT MOSFET10kV

    Kelvin chuck/

    InkerTTL RS232 GBIP IGBT

    cable Agilent Keithley

    ■■■■■■■■

    DIODE, MOSFET, IGBT

    Pegasus FAPG150D

    CCD Wafer

    2 cassettewafer

    ■■■■■■

    Pegasus 2000D

    3”~8”30A

    TTL RS232

    ■■■■■■■

    Model M200FA

    Model S200FA-HV

  • GAMMA TIA-3000■■■■■■

    7

    AR/VRGAMMA GS-1290-NED■

    ■■

    LEDGAMMA RS-7

    Camera

    ■■

    ■■

    GAMMA GS-1220/1190

    LED

    Display

    GAMMA GS-1290-DMS/RadOMA-NVISGAMMA GS-1290-DMS■■■■■

    6 LCDGAMMA GS-940-7X■■

    ■■

    /UDTi S470/480/490■

    ■■■■

    GAMMA uRAD-FL■

    ■■■■■

    2D VCSEL (Far Field)GAMMA GS-655CAM

    VCSEL

    ■■■

    ■■

    VCSEL (Near Field & LIV)GAMMA GS-655-NIR■■■■

    /GAMMA 191■■

    ■■■

    VCSEL Power supply

    Far Tield

    Camera system

    Conoscopic len

    Computer andSoftware

    GAMMA RadOMA-NVIS■■■■

    MIL-L-85762A MIL-STD-30090.00015cd/m²

    380~930nm 380~1100nm

    310~1100nm ±0.25nm

    0.0005cd/m2 5° 2° 1° 0.5° 0.3° 0.1°

    NIST

    GS

    3D LCDMFT LCD

    lm mW/cm2 cd j/m2 lux 10/

    200~1750nmCIE f1’

  • www.quatek.com.tw

    8/

    ■■■■

    ■■

    Roadvista 922■■■■

    Roadvista 1000

    ■■■■■■■

    Roadvista StripeMaster II-Touch■■■■■■

    Roadvista 1200F

    ■■■■■■■

    Roadvista 932

    ■■■■

    Roadvista 933■■■■■

    Roadvista Laserlux G7■■■■

    Roadvista 940D

    : -45°~+45°: 0.2°~+2°

    ASTM E1709, EN471, ANSI 107 CIE x,y

    32000

    0.2°/0.5°ASTM CIE DIN

    GPS

    4500

    ASTM CIE0.2°/0.5°

    10~30mASTM CIE DIN

    -60°~+60°-180°~+180°

    30000

    400Android,IOS,windows

    USB

    TFT-LCD25000

    /GPS

    ASTM E1710/EN1436 30

    /ASTM CIE DIN

    10000GPS

  • TREK 152-1

    (CPM)TREK 156A/157/158ATREK 520/523/876/884

    ■■■■■

    ■■

    ■■

    ■■

    ■■

    TREK 821/820/800 ■

    ■■

    820

    800

    TREK 901HS■

    ■■■■

    ■■■■■

    /

    TREK 541A-1/542A-1

    ■■

    ■■

    TREK 511/1501

    821

    156A

    157

    158A

    1

    TREK PD04002A■■■■

    TREK 344/PD06078( )■■■

    MONROE 291■■■■■■

    ■■

    MONROE 287B■

    ■■■■■■■

    9

    -

    -

    -

    --

    -

    CAFE

    ■■■■■■■

    Wolfgang METRISO 3000/B530

    MONROE 282A/282IS■

    ■■■■■■■

    HOLD 40

    Intrinsically safe (IS) meter UL Certification Class I Division 1, Groups A, B, C, D and

    Class II, Division 1, Groups E, F, G

    0-±55V0.2%

    20pF±4pF-60°C~160°C

    RH 80%

    0~±2kV DC(520 & 876) 0~±20kV DC(523 & 884)

    5%( )5~25mm

    φ25~175mm

    (876/884 )

    156A 3 1/2 LED157 158A

    ± 1V

    - / ±1000~±100V( )- /

    6” 1”

    USB PC(TREK 157/158A)

    DI-Water

    (10V CDM )(100V CDM )

    EMILED

    0~±100V DC AC (800) 0~±2kV DC AC (820/821)

    ±0.1%( )(800/820) ±1%( )(821)

    1kHz(821) 5kHz(820) 12kHz(800)LCD

    12 LED -

    103~1012

    -

    ANSI/ESD SP3.3

    0~2KV/10KV DC Peak AC0.05% 0.2%

    CE

    - ±1kV DC peak AC(TREK 541A-1)- ±100V DC peak AC(TREK 541A-2)- ±10kV DC peak AC(TREK 542A-1)- ±20kV DC peak AC(TREK 542A-2)

    ±1% (TREK 541A) ±5% ±0.2% (TREK 542A)LCD

    USB

    511

    L: ±2KV H: ±20KV 5%TREK1501 5

    ANSI103Ω ~ 1012Ω 10%

    DC 10V 100V 500V1mA≤I≤1.3mA

    0~10KΩ 1KΩ~1.2TΩModel850(2.27kg/ 63.5mm)

    50000

    103~1013Ω103~1012Ω ±5%

    1013Ω ±8%6

    152P-CR-1 IEC ESDA

    152BP-5PANSI/ESD-STM4.1152P-2P

    (CAFE) ANSI-ESD SP15.1-2011

  • www.quatek.com.tw

    10

    OLED/

    ESD

    QTI-VM-QSW■■■■

    Trek 344/PD06078( )■■■

    0~2KV/10KV DC Peak AC0.05% 0.2%

    QTI-RM-120/920A■

    ■■

    ■■

    ()

    750KΩ~35MΩ±5%(

  • TET M1200

    HBM MM CDM LATCH-UPMIL EIA/JEDEC AEC ESDA

    0~±8KV256Pin

    CCD

    ■■■

    CDMTET CDM-550

    D-CDM F-CDM

    101024Pins

    EIAJ ESDAJEDEC

    ■■■■

    ETS 9910PinScan/9910PinPulse±5V~±8KV

    HBM (100pF / 1,500Ω): ±5V~±8 KV MIL STD.883E, ANSI/ESDA/JEDEC JS-001MM (200pF / 0Ω ): ±5V~±2KV

    ANSI/ESDA S5.2-2012HMM (150pF / 330Ω ): ±5V~±5KV

    IEC 61000-4-2PinScan 128Pins

    ■■

    ETS 5532

    81X36cm36x10cm

    ■■

    ■■

    ETS 930D ESD Gun±100V~±26000V ±30000V

    /

    HBM, IEC, MIL Automotive

    ■■■■

    HMMBARTH 4702 IEC-50

    500V~23KV75A PEAK/50Ω

    0.7~1.0nSIEC-50

    ■■■■■■■

    HBM TLPBARTH 4003TLP

    CDM TLPBARTH 4012 VFTLP+

    BARTH 4012 VFTLP+ TLP

    I/V100ps

    1ns, 2ns, 5ns,10ns( )0~500V 1000V( )[email protected]Ω 20A( ) 30A( )

    ■■■■■

    ■■■■

    ■■

    ■■■■■

    TET Ecdm-400E/800E

    HBM MM D-CDM F-CDM0~±400V/4000V(Ecdm-400E)

    0~±8000V(Ecdm-800E)

    1V(400E/800E)1~99

    ESDA JEDEC IEC AECWafer Level

    ESDTET 7000

    HBM MM Latch up MILEIA/JEDEC JEITA AEC ESDA

    Pin 1024Pins125°C

    ■■■

    TLPESDEMC ES-621

    7120A

    TLP VFTLP HMM

    ■■■■

    TET M1200

    TLPI/V

    ±1.5%Package ( 48-pin DIP )

    Wafer Model 450020~500V 1000V( )[email protected]Ω 20A( ) 30A( )

    11

  • TREK 950Trek950 0.02 0.5Mpa

    10mm ±3V

    ■■

    0.2μmTeilch Pro 202

    200nm~10μm10nm

    ■■■■■■

    CE NIST

    ■■■■

    HalTech RPC200

    WV-9000

    2”~12“■■

    EXSEALUrethane

    3 1

    ■■■■

    EXSEALUrethane

    1

    ■■■■

    Wolfgang WarmbierEXSEAL

    108Ω/■■

    EXSEALUrethane

    Tray

    ICPEN-VAC® ■■

    dust

    Dirt

    www.quatek.com.tw

    12/ /

    ±5V ( 300mm)1.5 ( 300mm )

    1.4~3.2m3/min×30.8~1.0m/s( 300mm )

    0~40°C 15~85%566×146×69.5mm(W×H×D)

    3100g61dB(A)( 1m)

    SSD HDC-AC

    ■■■■■■■

    ■■

    SSD BF-6MB■■■■■■■■■

    SSD CABX

    HDC-ACSSD BF-2MA-LV■■■■■

    HDC-AC±1V

    3S(30mm)

    ±30V( 300 mm 0.3MPa)0.01~0.5 MPa

    5~40°C15%~85%

    350~3100×92×29mm(W×H×D)SSD HDC-AC

    CABX-HWCABX-LW

    HDC-ACSSD BF-X2MC■■■■■

    HDC-AC±5V

    3S(30mm)

    )

  • SEKISUI Eslon DC Plate

    - 106~108Ω/-

    - Eslon DC

    - Eslon DC PVC PMMA/ PC

    -

    SEKISUI Eslon DC Sheet G /DC Sheet clean

    - Sheet G PVC 108~109Ω/- Sheet Clean 1010~1011Ω/

    Sheet GSheet Clean

    ■■■

    /SEKISUI Eslon DC3D

    - 106~108Ω/-

    - > 85% > 3%

    - PVC /PMMA /PC - -

    106~1012Ω

    (Outgassing)

    (103~1012Ω·cm)

    ■■■■■■■

    Wafer carriersFOUPIC test socketBurn-in socketLCD related parts

    ■■■■■

    Storage traysChip carriersEquipment casesCassettesTweezers

    ■■■■■

    PEEK,LCP,PES,PPS,PBI,PEI,PBT,PC,POM,PMMA,OthersKrefine type A: 1010~1012Ω

    Krefine type B: 108~1010Ω Krefine type C: 106~108Ω

    500×500×10mm 500×500×12.5mm 500×500×20mm 100×150×5mm

    ■■

    ■■■■■■

    CoosTek Cerastat ESD Safe Ceramic

    Surface Resistance Surface Resistance (ohm(ohm )) 1)

    Static Decay Time Static Decay Time (1000V to 5V) (1000V to 5V) 2)2)

    Residual VoltageResidual Voltageafter Discharge after Discharge (Hot(Hot --spot)spot) 2)2)

    Peak Current on Peak Current on ESDESD3)3)

    ProperProper RangeRange1) ESD STM 11.112) KUREHA Method3) ESD STM 5.3.1Carbon Fiber Filled Materials

    ■■■

    ■■■

    13

  • 8ppm 301025ppm 304150ppm 3050V AC/DC 1025VA AC/DC 30AΩ 2 /4 1GΩF 10mFH 10HHz 10MHzRTD/PRT

    10nV~1050V 8½ 4PPM

    0.1uV~1000V 6½ 0.02%

    0.1uV~1000V 6½ 200PPM

    1μA~30A 6½ 200PPM

    0.1μΩ~1TΩ 8½1Hz~10MHz 7½PRT~200°C~660°C 8½

    ■■■■■■■■■■

    AD/DC /RS232

    GPIB/USB

    250MHz/350MHz/600MHz

    ■■■■

    TRANSMILLE 3000A

    ■■■

    ■■■■■

    AHI AH 2700A

    / LCRPA

    8 7 Transmille 8104/8109■

    / GPSTRANSMILLE 8700■■■■■

    TRANSMILLE 4010/4015■

    ■■■

    /Calmet C300B

    ■■■■■

    TRANSMILLE 3200A

    ■■■■■

    TRANSMILLE1000A

    TRANSMILLE9000A

    1000 3½ 4½

    9000

    3300

    Calmet C200/C233■■■■

    IET CS■■■

    IET 1693■■■

    IET LS■■

    Calmet /

    / /

    / /

    IET RS■■■

    IET HRRS-5kV■■■

    IET SRL/SRR/SRC■■

    1.5x10-8 tann δ 3x10-7 nanosiemens 1.7x108 gigaohms0.4s 30ms8 / 5

    3

    ±100V

    NIST NPL

    4000

    8ppm/15ppm7

    6GHz

    U PROCAL4000 USB

    - 1TΩ - 0.1Ω

    - 0.05Ω 1KΩ - 12KV

    560V120A, 360A

    0.02% 0.05%

    1pF~11111μF0.01%~4%

    1μH~11H0.025%~4%

    1mΩ~1.9TΩ 10Ω~10TΩ0.01%~1%

    12Hz~200kHz0.02%

    : 0.00001Ω~99999kΩ

    420V20A(100A)45~70Hz0~±90°

    1mΩ~10TΩ1ppm~1%

    1GHz1GHz

    GPS/

    3 /2

    www.quatek.com.tw

    14/ /

  • INPUTSIGNAL

    FEEDBACK S IGNAL

    HIGH GAININTEGRATOR

    HIGH-VOLTAGESUPPLY

    VOLTAGE OUTPUTMONITOR

    HIGH-VOLTAGEOUTPUT

    HIGH-VOLTAGESUPPLY

    OPTO

    ISOL

    ATIO

    N

    PRECISION RESISTIVEDIVIDER

    OUTPUT STAGES USINGCASCODED MOSFET'S

    A

    CLASS AB

    +

    +

    POSITIVE

    NEGATIVE

    s

    :i = 4 f (Cload + X pF) Vpeak

    :i = (Cload + X pF)2 f Vpeak

    :i = (Cload + X pF) dV/dt

    Vpeak-to-peak Vpeak-to-peak dV

    dt

    -30 kV

    +2 0 mA

    +3 0 kV

    -20 mA

    50Hz 50%

    Ipeak = Cload = ( )Cint = *f =

    Vpeak-to-peak = dV = dt = dV/dt = /

    Trek Model10/10B30/20A20/20C5/80601C50/12610E609E-6609B-3PZD700APZD350A60310/40A

    C55pF50pF60pF70pF400pF34pF66pF50pF66pF665pF365pF800pF40pF

    int

    /Vout max: ±5V~±100VPW: 50~500msTr: 0.2~10nsOffset: 0~±20VPRF max: 50MHzDelay time: 25ns~500ms

    Vout max: 200~3000VIout max : 400mA~200APW: 5ns~1msTr: 2~100nsTf: 2~100nsPRF: 0~1MHz

    Vout max: 20~100VPW: 0.2ns~1msTr: 0.3~10nsTf: 0.3~10nsPRF: 0~1MHz

    Avtech

    FID /

    Iout max: 0.1~500APW: 0.4ns~DCTr: 0.2ns~2μsTf: 0.2ns~2μsPRF: 0~25MHz

    / /MEMS EBIT

    ...

    FPG-NHFFPG-PHFFPG-PXFPG-NXFPG-NFPG-P

    FPG-SP

    1KV-50KV0.2KV-50KV1KV-50KV1KV-50KV1KV-1MV

    2KV-200KV2KV-10KV

  • www.quatek.com.tw

    16/PCB

    /Dranetz PX-5/PG-4400/PV-440

    Dranetz HDPQ Visa

    8IEEE 1159 IEC61000-4-30 Class A

    EN50160 GB

    IEEE 1159IEC 61000-4-30 Class AEN50160 GB

    CCD Bent PinPCB SMT

    600x900mm 9μm/pixel~25μm/pixel

    Offline AOIVista

    402 60K 1520x760mm61,440Pin

    IC Level 4Clamshell Vista

    10K Pin 60Pin

    (Word )/ .

    1MHz .

    IEC 61000-4-30 A, IEC 61000-4-7, IEC 61000-4-15, en50160, NVE, IEEE 1159, IEEE1453, IEEE 519, IEEE 1459

    - 24 16 0~10V

    6 0.2%0.2% 0.5%

    0.25~1.0Vrms1.0Vrms

    ESR Z

    4 USB

    LCDIVHuntron Tracker Signature Analysis

    DH ProberLabVIEW DUT

    Z RFNI PCB

    CCD

    ■■■■■

    AC/DC1000Vrms 512

    8 4 4IEC61000-4-30 A IEEE1159

    - IEC61000-4-7 IEEE519EN 50160 Ed 3

    ■■■■

    Dranetz Encore 6100■

    ■■■■■

    ■■■

    ■■■■■

    ■■

    PCBHuntron Tracker 2800/2800S

    PCBHuntron Tracker 3200S

    Huntron Access Series■

    ■■■■■

    ■■

    AOITESTRONICS 506■

    ■■

    Pin ICTTESTRONICS 402 60K

    ■■■

    AccessDH Prober

    Access2 Prober

    ADI Smart Tweezers ST5S

    PCB

  • :

    Sigma

    Radiant Multiferroic/Premier II/Precision LC/RT66B

    ■■■■■

    ■■■

    ■■■■■■■

    ■■■■

    ■■■

    ■■■■■■■

    ■■■

    5 LAB PEANUTS

    ■■

    ■■

    Radiant PNDSAFM

    /DIPA 2000i■

    ■■■■

    ■■■

    ■■■

    Trek E.F.M. 1100TM

    ■■■

    AFMWorkshop NP-AFM

    ■■■■■■■

    LED ELQuatek M2442S-9A

    Quatek 5601TSR/QT-50

    ( )

    (=20 )

    Multiferroic II Premier II

    5KHz @ 10V5KHz @ 30V5KHz @ 100V5KHz @ 200V2KHz @ 500V

    RT66CLC II

    ±100V±200V±500V

    2.5MHz 2.5MHz 250kHz

    ±10V±30V±100V±200V±500V

    250KHz @ 10V50KHz @ 30V50KHz @ 100V50KHz @ 200V2KHz @ 500V

    270KHz @ 10V270KHz @ 30V270KHz @ 100V100KHz @ 200V5KHz @ 500V

    ±10V±30V±100V±200V±500V

    ±4KV/±10KV

    500kHz1 inch* 1 inch0.25 inch

    >20μs

    ■■■■

    AFM

    PNDS

    AFM Chuck

    Sample

    PZT Actuator

    Error Function

    Control Signal

    Quad Cell Laser

    Σ

    GPID HVA

    Sample

    -40

    -30

    -20

    -10

    0

    10

    20

    30

    40

    50

    -6 -4 -2 0 2 4 6

    Volts

    uC/c

    m^2

    , uA/

    cm^2

    , uF

    /cm

    ^2

    RemanentPolarizationSW CV*10

    nSW CV*10

    SW IV*2.5

    nSW IV*2.5

    0.26 micron thick 20/80 PZT with platinum

    electrodes.

    Cantilever Tip Displacement

    -2

    0

    2

    4

    6

    8

    10

    12

    14

    -40 -30 -20 -10 0 10 20 30 40

    4/20/804/52/48

    Corrected for impedance error.

    Displacement in microns.Hysteresis vs Temperature

    -60

    -40

    -20

    0

    20

    40

    60

    -2000 -1500 -1000 -500 0 500 1000 1500 2000

    Temperature (C)

    Pola

    rizat

    ion

    (uC

    /cm

    ^2)

    30C50C70C90C110C130C150C170C190C

    / CV/ D33

    ( )

    17

    D33-

    -( )

    DLTS

    I(V) C(V)

    0.1nm/ ±1.5mm

    670nm diode, 500kHz

    vs vs

    PUND vs vs ( )

    IV vs vs ±50Oe

    ( )GPIB RS232

    - -175~500°C-

    22.9cm(H)x25.4cm(W)x19.1cm(D)91.4cm(H)x91.4cm(W)x91.4cm(D)

    0.1~3600μm

    2”GaN / VFLED Wafer 9 QC

    / 30 9LED

    6ΦLED phase

    AFM

    vibrating non-vibratinglateral force phase

    10μm±1KV

    0.5 % F.S..

    1V2000um square

    Static, Line Profile & 3D Mapping

    ITO

    - 10mΩ~22kΩ- 50mΩ/ ~100kΩ/

    ±1DC~100nA

    0.013nm0.2μc/cm3

    10kV( )0.05~1.5mm

    PEANUTS

    EFM (Electrostatic Force Microscope) Electrophotography MEMC

    ±200V

    5kHz

    1/8th Hz

    1KHz

    10pA

  • JOVA ISL-4800■

    ■■

    Q/mTrek 212HS-3A■

    ■■■

    Trek 230 TO■■■■■■■

    QEA TFS-1000■■■■

    idb ID-909■

    ■■

    MIPI SMIA!

    www.quatek.com.tw

    18/

    QEA Personal IAS II■

    ■■

    QEA MFA-2000L■■■■

    QEA Scanner IAS■■■

    QEA IAS-1000■■

    QEA PDT-2000■■■■■■■■■■

    /QEA DRA-2000LL■

    ■■■■■

    250MHz/1 2 4 MIPI(CSI2)960Mbps/SMIA(CCP2) 650Mbps

    (DVP DVI HDMI )12 24 -

    108~1016Ω·m 10V 8 108~1010Ω 4~10KV 1011~1015Ω

    28ml( ) 10-6~10-8Coulombs

    3-off 10-7~10-9FSD

    / / / / /

    ISO-13660ISO-12233

    5μm 33μm

    USB PC

    Blow-off

    / Q/m

    /

    -0.19999~0.19999μc0.00001μc

    ±0.1%( )1~100kPa2~10kPa

    USB PC

    PIDC

    /

    Pass/Fail

  • [email protected]

    ( ) 308 411493 +886-2-27973357 +886-2-27973957

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    430070

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    E-mail:[email protected]

    V8.19T

    General catalog-2019-TW.pdfP1-2_2019Apr.P3-4_2019Apr.P5-6_2019Apr.P7-8_2019Apr.P9-10_2019Apr.P11-12_2019Apr.P13-14_2019Apr.P15-16_2019Apr.P17-18_2019Apr.