Croissance monolithique de composés III-V-N à...
Transcript of Croissance monolithique de composés III-V-N à...
1Croissance monolithique de composés III-V-N à azote Croissance monolithique de composés III-V-N à azote dilué sur substrats de Si et projet ANR MENHIRS dilué sur substrats de Si et projet ANR MENHIRS
O. Durand, S. Almosni, C. Robert, T. Nguyen Thanh, C. Cornet, A. Létoublon, C. Levallois, L. Pedesseau, J. Even, J.M. Jancu, N. Bertru, and A. Le CorreUniversité Européenne de Bretagne, INSA, FOTON-OHM, UMR 6082, F-35708 RENNES, FranceFabien Mandorlo, Mustapha LemitiINL, INSA de Lyon, Bâtiment Blaise Pascal, 7 avenue Jean Capelle, 69621 VILLEURBANNE CEDEX, FrancePierre Rale, Laurent Lombez, Jean-Francois GuillemolesInstitut de Recherche et Développement sur l'Energie Photovoltaïque (IRDEP), UMR 7174 - CNRS-EDF-ENSCP, EDF R&D, 6 quai Watier, 78401 Chatou Cedex, FranceEric Tea, Sana LaribiInstitut de Recherche et Développement sur l'Energie Photovoltaïque (IRDEP), UMR 7174 - CNRS-EDF-ENSCP, EDF R&D, 6 quai Watier, 78401 Chatou Cedex, FranceAnne PonchetCEMES-CNRS, Université de Toulouse, 29 rue J. Marvig BP 94347, 31055 Toulouse Cedex 4, FrancePaul Bellavoine, Philippe LaferriereHeliotrop SAS, Paris Innovation, 24 rue de l'Est, 75020 Paris, FranceFilip TuomistoAalto University School of Science and Technology, AALTO,Finland
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© Heliotrop
Cellules multijonctions à concentrationContexte énergétique: remplacer les cellules Si monojonctions(faible rendement: asymptote des couts: 1€/Wc pour les modules)
<1€/Wc 0,2 €/Wc
MENHIRS: the issues
Projet labellisée par le pôle « Advancity » (Ville & Mobilité Durable)
Also: GaPN/GaP/Si(001) pseudo-substrates (project JCJC ANR-Sinphonic)
Route to increase the efficiency
λc
λ< λc =>energy losses, heatingλ > λc => non-absorbed photons
issue 1: issue 2: thermalisation
Eg V
Abso
rptio
n
Photon
Electron
HoleThermalisation
Ehν
Thermalisation
Ehc/λEFn
EFp
AvailableEnergy
Simple junction:
Decreasing of Eg (GaSb, Ge):More thermalisation
Increasing of Eg (GaP): less absorption
Multijunction:
Eg1 V
Abs
orpt
ion
Electron
Hole
Ehν1
np
Ehc/λ1
Ehc/λ2
Ehc/λ3
Eg2
VAbs
orpt
ion
Electron
Hole
Ehν2
np
Eg3 V
Abs
orpt
ion
Electron
Hole
Ehν3
np
Ehc/λ3
Ehc/λ2
Ehc/λ3
bluegreen
red
Stacking of several junctions, each specialised in one solar spectrum part
blue green red
∑= OCTotalOC VVI
VOC 1
VOC 2
VOC 3
Multijunctions: usually, direct gap III-V materials
optimum:= « current matching »
Route to increase the efficiency
High-Efficiency multijunction III-V Solar cells
GaAs and Ge substrates Current/proven technology, lattice match
Tandem cells: GaInP/GaAs Triple junctions: GaInP/Ga(In)As/GeSous concentration
Two conditions:1) Current matching (optimum gaps and thicknesses)2) Lattice matching (same lattice parameter)
Very difficult to get both!!!
Current technology
Epitaxial growth (MBE, MOCVD)
Lattice-matchedBut: current mismatched (Ge: 0.67 eV ?: 1eV)
New efficiency record: 44% at 947 suns (AM0), 16th october 2012
Solar International:
1 eV cell !!!
GaInAsNSb (diluted nitride)
Current matchingand Lattice matching
Triple junctions: GaInP/GaAs/GaInAsNSb/GaAs
High-Efficiency multijunction III-V Solar cells
tandem cells III-V/Si lattice-matched
"Material considerations for terawatt level deployment of photovoltaics" ; A. Feltrin, A. Freundlich, Renewable Energy 33, 180 (2008).
Ge Concentration: 1.5 mg/kg
Issue: substrate costs
High-Efficiency multijunction III-V Solar cells
Optimal solution?Optimal solution?III–N–V semiconductors for solar photovoltaic applications, J F Geisz and D J Friedman, Semicond. Sci. Technol. 17 (2002) 769–777
GaAsPN: In-free, diluted-N, « direct » band-gap
To be developed (medium afficiency, low cost):
New technology:Si cheap, Large substrateGaP and Si: LM 0.4 %GaAsPN and Si: LM and 1.7 eVNo misfit dislocations
tande
m cells
High-Efficiency multijunction III-V Solar cells
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Coherent growth of III-V onto Si (MBE): Monocristalline thin layerstwo main stumbling blocks
Silicium
GaAsPN
Silicium (001) 4° 6°-off
GaP
Preliminary targeted
structure:(MBE growth)
Epitaxial growth of III-V onto silicon
GaP 2) efficient absorber: efficient absorber: second stumbling blocksecond stumbling block
1) GaP 20 nm/Si: first stumbling blockGaP 20 nm/Si: first stumbling block
GaAsPN: Diluted nitride (2-4%) GaAsPN: Diluted nitride (2-4%) lattice matched direct band lattice matched direct band
gap material gap material
10Defects at the GaP/Si interface
T
Typical Micro twin in a ZB
structure
Coherent growth
Defects at the interface: Micro twin (MT), stacking fault (SF), anti-phase domain (APD), misfit dislocation (MD), etc.
Growth of GaP/Si without Si bufferGrowth of GaP/Si without Si bufferT Nguyen Thanh et al, J. Appl. Phys. 112, 053521 (2012)
11GaP/Si interface: MicroTwins
TMicroTwins
Reciprocal space lattice
Signature of the MTs
Rotation axis
Rotation axis
Small domains of rotated cristal
Signature of the MTs
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TMicroTwins
Reciprocal space lattice
Signature of the MTs
Experimental XRD RSM around the (002) Bragg reflection (GaP 20 nm/Si(001) 4°-off)
Synchrotron, (ESRF)
GaP/Si interface: MicroTwins
N. BoudetCRG-D2AM, ESRF &Inst. Néel, CNRS-UJF, 25 Av
des Martyrs, 38042 Grenoble, France
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TMicroTwins
Reciprocal space lattice
Signature of the MTs
Synchrotron, (ESRF)
TEM Cross-section of GaP/Si – Tgrowth = 400°C (CEMES)
Quantification of the MTs with respect to the MBE growth conditions
Experimental XRD RSM around the (002) Bragg reflections
GaP/Si interface: MicroTwins
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TC = 400°C
Micro-Twins
Optimisation de l’interface GaP20 nm/Si: réduction des Micro-Twins (MT)
GaP (004)
TC = 580°CGaP (004)
T Nguyen Thanh et al, J. Appl. Phys. 112, 053521 (2012)
A. Létoublon et al, J. of Cryst. Growth 323 (2011) 409–4123
W. Guo et al, Appl. Surf. Science 258 (2012) 2808– 2815
T Nguyen Thanh et al, Thin Solid Films (in press)
Defect density (MTs): decreases with the growth temperatureDefect density (MTs): decreases with the growth temperature
GaP/Si interface: MicroTwins
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a0/2
APDB APDAAPDB
Si (4°-off)Si (4°-off)
GaPGaP
ξAPD
III-V/Si issue: AntiPhase boundaries (Ga-Ga and P-P bonds)
GaP/Si interface: AntiPhase Domains (APDs)
Growth onto 4°-off or 6°-off Si(001) substrates:help to anhihilate the AntiPhase Domains (APDs) recombination centers (see poster P. Rale and E Tea)
Williamson-Hall plot (scans transverses)
O. Durand et al, Proc. SPIE 7940 79400L (2011).
X-Ray Diffraction
Defect density (APDs and MTs): decreases with the growth temperatureDefect density (APDs and MTs): decreases with the growth temperature
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٥ 2nd stumbling block: GaAsPN absorber
MENHIRS: first results
Light absorber around 1.7eV (GaP10 nm/ GaAsPN 100 nm/GaP(001))
Undoped structure PL: 1.74 eVat RT
Photoluminescence @RT(but very high Plaser ), λ=820 nm
Experimental results on GaAsPN/GaPN QWs onto Si(001)
AFM:RMS = 11.6nm
T. Nguyen Thanh et al, in press, J. of Cryst. Growth
I(V)Results:see poster P. Rale and E Tea
doped structure
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٥ Preliminary result (GaAsPN /GaPN) MQWs diode grown on GaP(001)
-0,4 -0,2 0,0 0,2 0,4 0,6 0,8 1,0 1,2 1,4 1,6-0,004
-0,003
-0,002
-0,001
0,000
0,001
0,002
0,003
0,004
Cur
rent
den
sity
(A/c
m²)
Voltage (V)
η = 1.6% without any concentration.Voc: goodISC: weak due to the small absorption volume.
absorption due to the MQWs
Contacts front and back surfaces: Ni/Au/AuZn and Ni/Au/Ge alloys.Front contact: annular (∅ = 300 µm, width = 20 µm)
see poster S. Almosni
Posters:P. Rale and E Tea (IRDEP): “Toward a III-V/Si tandem solar cell: characterization and modeling”S. Almosni (FOTON-INSA): “Evaluation of GaAsPN and InGaPN for photovoltaic (PV) applications”
MENHIRS: first results
AM1,5G
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٥ Conclusion
MENHIRS: Conclusion
Aim of MENHIRS: elaboration of a GaAsPN/Si tandem cell (1.7eV/1.1 eV)
First main issues:GaP/Si interface GaAsPN absorber
Preliminary (encouraging..) result: 1.6% efficiency on a (GaAsPN /GaPN) MQWs diode
Solid source MBE Riber Compact 21
UHV - LPCVD (Riber)+
Following issues:tunnel junctionSi junctionetc…
To be continued…
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Tg = 350°C Tg = 450°C
= 11±1 nm ≡ APD
= 9.5±1 nm ≡ other defects = 23.7±0.2 nm
≡ all kind of defects
GaP/Si interface: AntiPhase Domains (APDs)
WHL-plots: slope WHL-plots: slope lateral « crystallite size » lateral « crystallite size »
Preliminary results:Preliminary results:higher growth temperature higher growth temperature larger crystallite sizes larger crystallite sizes
= lowering of the defects density= lowering of the defects densityBut:But:
Increasing of the surface roughness vs growth T°Increasing of the surface roughness vs growth T°